20N non-magnetic and vacuum capable high precision linear actuator
The Piezo LEGS® LT20 linear piezo actuator is intended for OEM applications with focus on precise positioning in magnetic, vacuum or normal temperature and pressure (NTP) environments
A linear actuator with exceptional size to force ratio and nanometer precision.
- 20 N force
- Non-magnetic
- Vacuum capable
- Nanometer precision
- Direct drive – backlash free
- No power draw in hold position
- Quick response and high speed dynamics
The Piezo LEGS® LT20 linear actuator
The LT20 linear motor is intended for a large range of OEM applications. Design focus has been for ease of integration. The very high speed dynamics and nanometer resolution makes it ideal for numerous applications.
The motor is ideally suited for move and hold applications or for automatic adjustments. When in hold position it does not consume any power. The drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor has no mechanical play or backlash. The LT20 linear motor is available in standard version, vacuum version, and non-magnetic vacuum version.
It is an excellent fit for Semiconductor Manufacturing Machines for wafer slicing and polishing, lithography, ion implementation and wafer inspection and metrology.
The Piezo LEGS® LT20 is used in the Medtech Industri for drug delivery systems, surgical tools and robotics, diagnostic and imaging devices and medical material handling.
Specifications Piezo LEGS® LT20
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Type |
Normal (A) |
Non-magnetic (C) |
Non-magnetic Vacuum (D) |
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Maximum stroke |
74.5 mm |
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Speed range @ Rhomb, no load, 20ºC |
1 nm/s – 20 mm/s (check driver) |
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Step length, full step @ Delta, no load, 20ºC |
3.3 µm |
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Maximum speed (driver and waveform dependent) |
20 mm/s |
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Max operating frequency (driver dependent) |
2.5 kHz |
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Movement resolution |
<1 N |
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Stall force |
20 N |
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Holding force |
>20 N |
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Vacuum |
No |
Yes (10-7torr) |
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Non-magnetic |
No |
Yes |
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Max operating voltage |
48 V |
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Power consumption |
10 mW/Hz |
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Mechanical size L x H x D |
22 x 21.8 x 10.8 mm |
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Weight with 50 mm drive rod |
29 g |
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Material in motor housing |
Stainless steel |
Arcap (non-magnetic) |
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Operating temperature (recommended) |
-20 to +70°C |
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Storage temperature |
-20 to +70°C |
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Built in encoder |
No |
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Connector motor (motor side) |
2 x JST BM05B-SRSS-TB |
Soldered cable w. 2 x JST 05SR-3S |
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Control |
Open Loop or Closed loop |
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Lifetime (km) |
2,5 X 109 WFM-S* |
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Index |
N/A |
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Max. acceleration |
800Hz/ms
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Main dimensions Piezo LEGS® LT20
Motor performance LT20
Motor performance with waveform Rhomb (filled) and waveform Delta (dotted). The full step length is the average distance the drive rod moves when the legs take one full step (i.e. for one waveform cycle).
Note: A standard deviation σ of 0.5 μm should be taken into account.
Typical values are given for 20ºC.
Stroke range
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Stroke (mm) with one adapter
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Drive rod length (mm)
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0-6.6
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30
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0-16.6 |
40
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0-26-6 |
50
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0-36.6 |
60
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0-46.6 |
70
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0-77.4 |
101
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Motor speed at 20 ºC
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Waveform
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Max feq. (Hz)
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Speed range (mm/s)
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Delta
|
3000
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0-15
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Rhomb |
3000
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0-24
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Controlling the motor
Our motor control units come in many different versions, with controllers and amplifiers for laboratory use as well as for integration into OEM devices.
We can also license the drivers for customers that want to build their own driver electronics.
Starter kit
Our Starter Kits are designed to simplify evaluation and accelerate development. Available in multiple configurations, they provide everything needed to begin testing and integrating your selected motor platform.
Each kit includes the required components to evaluate the motor.
Configure the LT20 and get a quote
