The Piezo LEGS 6.5N LL10D Non-Magnetic and Vacuum capable linear motor

The LL10 linear motor is intended for a large range of OEM applications with focus on precise positioning in environments that require a completely non-magnetic and/or a vacuum-compatible motor. The direct drive principle of the Piezo LEGS ensures motion without any mechanical play or backlash. Sub-micrometer movement is made easy with this very compact and strong motor. It replaces stepper motor assemblies when there is a need for better resolution and smooth linear movement.

Non-Magnetic and vacuum capable extreme precision linear motor LL10D

Compact size for small spaces

Without the ceramic driving rod the motor is 22 mm long x 19.3 mm tall x 10.8 mm. The ceramic driving rod length is the only variable.  It’s length depends on your stroke requirement.

Vacuum compatible

For vacuum compatibility the motor contains components, and is specially prepared, such that outgassing is minimized and that the motor can be baked at temperatures up to 125°C.


The piezoceramic actuators at the core of the motor are inherently non-magnetic and the motor housing and other parts are made from non-magnetic alloys. The magnetic flux density is less than 1 nT (sensor sensitivity in reference measurements) at a distance of 10 mm from the motor housing.

Non-magnetic vacuum capable extreme precision linear motor
Non-magnetic vacuum capable extreme precision linear motor
Piezo Legs Linear LL10D main dimensions
Legs Linear LL10D drawing top view

Motor Performance

Motor performance with waveform Rhomb (filled and waveform Delta (dotted). The full step length is the average distance the drive rod moves when the legs take one full step (i.e. for one waveform cycle).

Note: A standard deviation σ of 0.5 μm should be taken into account.
Typical values are given for 20ºC.

Motor performance piezo motor graph

PiezoMotor DriveLab software

We offer the PiezoMotor DriveLLab software for demo and starter kits.

This software supports the following controllers: PMD101, PMD301 and PMD401.

Software is compatible with MS Windows 7 or 10

PiezoMotor DriveLab Software for Piezo motor starter kits

Piezo Motor Starter Kits – A great way to get started, quickly

Starter kits are available for the Legs Linear LL10D. Use the contact form for pricing and availability. Check out our video on how to assemble a starter kit.
A kit includes:

  • Piezo Motor
  • Controller Board
  • Wiring Connector/Cables
  • Power Supply
Linear Non-Magnetic and Vacuum capable LL10D Piezo Motor

Piezo LEGS®motor technology

Piezo LEGS® work with friction drive, where force is created by the internal preload of the piezoceramic actuator legs in direct friction contact with the drive rod. When the legs start walking, they are always in mechanical contact with the drive rod.