The LL10 linear motor is intended for a large range of OEM applications with focus on precise positioning in environments that require a completely non-magnetic and/or a vacuum-compatible motor. The direct drive principle of the Piezo LEGS ensures motion without any mechanical play or backlash. Sub-micrometer movement is made easy with this very compact and strong motor. It replaces stepper motor assemblies when there is a need for better resolution and smooth linear movement.
The Piezo LEGS 6.5N LL10D Non-Magnetic and Vacuum capable linear motor
Compact size for small spaces
Without the ceramic driving rod the motor is 22 mm long x 19.3 mm tall x 10.8 mm. The ceramic driving rod length is the only variable. It’s length depends on your stroke requirement.
Vacuum compatible
For vacuum compatibility the motor contains components, and is specially prepared, such that outgassing is minimized and that the motor can be baked at temperatures up to 125°C.
Non-Magnetic
The piezoceramic actuators at the core of the motor are inherently non-magnetic and the motor housing and other parts are made from non-magnetic alloys. The magnetic flux density is less than 1 nT (sensor sensitivity in reference measurements) at a distance of 10 mm from the motor housing.
Motor Performance
Motor performance with waveform Rhomb (filled and waveform Delta (dotted). The full step length is the average distance the drive rod moves when the legs take one full step (i.e. for one waveform cycle).
Note: A standard deviation σ of 0.5 μm should be taken into account.
Typical values are given for 20ºC.
PiezoMotor DriveLab software
We offer the PiezoMotor DriveLLab software for demo and starter kits.
This software supports the following controllers: PMD101, PMD301 and PMD401.
Software is compatible with MS Windows 7 or 10
Piezo Motor Starter Kits – A great way to get started, quickly
Starter kits are available for the Legs Linear LL10D. Use the contact form for pricing and availability. Check out our video on how to assemble a starter kit.
A kit includes:
- Piezo Motor
- Controller Board
- Wiring Connector/Cables
- Power Supply
Piezo LEGS®motor technology
Piezo LEGS® work with friction drive, where force is created by the internal preload of the piezoceramic actuator legs in direct friction contact with the drive rod. When the legs start walking, they are always in mechanical contact with the drive rod.