Precision stages for linear and rotational positioning
PiezoMotor offers a new portfolio of precision stages for demanding positioning applications. Five coordinated stage families provide closed-loop linear, vertical, rotary and goniometric positioning—powered by Piezo LEGS® direct-drive technology.
Choose from X-axis, XY, Z-axis, rotary and goniometric stages. The portfolio supports applications with different requirements for travel, force, payload, speed, resolution and positioning geometry.
One portfolio. Five positioning families.
X-Axis Precision Stages
Precision positioning engineered for applications where every micron matters.
XY Precision Stages with Aperture
Integrated two-axis positioning with optical access and two force options.
Z-Axis Precision Stages
Two vertical-positioning mechanisms for travel-led or load-led applications.
Rotary Precision Stages
Fine limited-angle rotary positioning without a geared transmission.
Goniometric Precision Stages
Sub-arcsecond tilt about a 70.5 mm or 95.5 mm virtual rotation centre.
PMSD401–PMSD404 Controllers for Precision Stages
Avoid separate drivers, difficult encoder integration and repeated compatibility testing. Designed exclusively for PiezoMotor precision stages, the PMSD400 family provides one scalable platform for controlling one to four linear or angular-motion axes.
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Precision stages built for OEM innovation
Piezo LEGS® direct-drive technology
Compact motion starts with a simpler mechanical architecture.
Piezo LEGS® actuators drive the stage directly, without gears or lead screws between the motor and the moving platform. Removing conventional mechanical transmissions reduces the number of components in the motion path and avoids transmission backlash.
The technology is particularly well suited to compact OEM instruments where precision, mechanical stability and efficient use of installation space are critical.
Once the commanded position has been reached, the Piezo LEGS® motor can maintain its mechanical hold without continuous motor power. This helps limit stationary-state heat generation around sensitive optics, detectors, samples and measurement components.
Unsure how to define the right stage for your application? Read our guide to selecting a high-precision linear stage.
Piezo LEGS® Precision Stages Applications
Semiconductor equipment
High-resolution focusing with minimal heat generation and excellent stationary stability.
Dimensional inspection and calibration
Dependable, repeatable motion for measurement verification and equipment calibration.
Optical alignment
Compact multi-axis positioning for precise alignment of optical components.
Precision vertical positioning of heavy loads
Nanometer-scale vertical positioning with high load capacity and stable holding.
Advanced microscopy
Low-profile, repeatable motion for automated sample scanning and objective positioning.
Precision laser positioning
Accurate multi-axis positioning for directing laser energy onto samples and components.
