LEGS 40N Linear Piezo Actuator for stage mount
40N vacuum compatible Linear Piezo Actuator for stage mount
- Motor for linear stage mount
- Direct drive – backlash free
- Nanometer resolution
- No power draw in hold position
- Quick response & high speed dynamics
- Vacuum compatible
The Piezo LEGS® LS40 Piezo Motor
The Piezo LEGS LS40 linear motor is intended for a large range of OEM applications. Design focus has been for ease of integration for stage mount. The very high speed dynamics and nanometer resolution makes it ideal for numerous applications.
The LEGS technology is characterized by its outstanding precision. Compact design and quick response time, as well as long service life are other benefits. In combination with the nanometer resolution the technology is quite unique.
The motor is ideally suited for move and hold applications or for automatic adjustments of a linear stage unit. When the motor is in hold position it does not consume any power. The drive technology is direct, meaning no gears or lead screwsare needed to create linear motion. This means the motor has no mechanical play or backlash. The Piezo LEGS LS40 linear motor is vacuum compatible.
Specifications Piezo LEGS® LS40 (preliminary)
| Type | Vacuum | Unit |
| Maximum stroke Mounting dependency | 90 mm | mm |
| Maximum speed Driver dependent | 12 | mm/s |
| Minimum speed Driver dependent | 1 | nm/s |
| Minimal incremental motion | 0.5 | nm |
| Max operating frequency | 3 | kHz |
| Stall force | 40 | N |
| Holding force | >40 | N |
| Vacuum | Yes | 10-7 torr |
| Non-magnetic | Yes | |
| Operating voltage | 42-48 | V |
| Power consumption | 20 | mW/Hz |
| Mechanical size L x H x D | 32 x 16.8 x 21 | mm |
| Weight | 70 | gram |
| Material in motor housing | Stainless steel | |
| Operating temperature | -20 to +70 | ºC |
| Storage temperature | -50 to +85 | ºC |
Dimensions of Piezo LEGS® LS40
Controlling the motor
Our motor control units come in many different versions, with controllers and amplifiers for laboratory use as well as for integration into OEM devices. These controllers are compatible with the compact linear actuator for optimal performance.
We can also license the drivers for customers that want to build their own driver electronics.
Motor Starter Kit
Our Starter Kits are designed to simplify evaluation and accelerate development. Available in multiple configurations, they provide everything needed to begin testing and integrating your selected motor platform.
Each kit includes the required components to evaluate the motor.
