The Piezo LEGS® linear 6.5N LL06 motor

A 6.5N Linear Piezo Motor that is extremely compact, weighing only 16 grams. It has true direct drive with no backlash and can microstep in the sub-nanometer range. It is available with or without built-in encoder (e.g., 1.25 µm or 80 nm) and/or guiding. Full force 6.5 Newton power-off locking safety function.
A version of the motor compatible with environments with strong magnetic fields and vaccuum is also available.

Linear Direct Drive 6.5N Piezo Motor
Linear Direct Drive 6.5N Piezo Motor

Compact size for small spaces

Without the ceramic driving rod the motor can fit within a 24 mm long x 20 mm tall x 11 mm (17x20x7mm without encoder and guide) wide space. The ceramic driving rod length is the only variable.  It’s length depends on your stroke requirement.

Encoder scale adhered to side of rod in close range of reader head conveniently provides accurate positional data.

The 6.5N Linear Piezo Motor is very compact.

Legs Linear LL06 Piezo Motor 3D
Legs Linear LL06 Piezo Motor 3D. Blue is ceramic drive rod
Drawing with measurements for Legs Linear LL06

Stroke range

Stroke (mm) With one adaptorDrive rod length (mm)
0-3.130 (not available with encoder)

Motor Speed at 20ºC, No Load

WaveformMax Freq. (Hz)Speed Range (mm/s)

Motor Performance

Motor performance with waveform Rhomb (filled and waveform Delta (dotted). The full step length is the average distance the drive rod moves when the legs take one full step (i.e. for one waveform cycle).

Note: A standard deviation σ of 0.5 μm should be taken into account.
Typical values are given for 20ºC.

Motor performance piezo motor graph

PiezoMotor DriveLab software

We offer the PiezoMotor DriveLLab software for demo and starter kits.

This software supports the following controllers: PMD101, PMD301 and PMD401.

Software is compatible with MS Windows 7 or 10

PiezoMotor DriveLab Software for Piezo motor starter kits

Piezo Motor Starter Kits – A great way to get started, quickly

Starter kits are available for the 6.5N Linear Piezo Motor LL06. Try our configurator or use the contact form. Check out our video on how to assemble a starter kit.
A kit includes:

  • Piezo Motor
  • Controller Board
  • Wiring Connector/Cables
  • Power Supply
Legs Linear LL06 piezo motor starter kit

Piezo LEGS®motor technology

Piezo LEGS® work with friction drive, where force is created by the internal preload of the piezoceramic actuator legs in direct friction contact with the drive rod. When the legs start walking, they are always in mechanical contact with the drive rod.

Applications where LL06 is used

The 6.5N Linear Piezo Motor LL06 is excellent for tiny highly accurate motion requirements. One example is the M Dialysis micro dialysis machine. The motors are also found in e.g Semiconductor Processing Equipment, Nanometer Positioning Systems, Advanced Optic Applications, Active Autofocus Systems and Surgical Robots.

M Dialysis. A new micro dialysis machine
M Dialysis. A new micro dialysis machine