Linear and Rotary Piezo Motors up to 450N with nano meter precision and no backlash

Linear Motors and Rotary Motors with Direct Drive and Extreme Precision

Linear motors built on our proprietary direct drive piezo technique. Extreme precision miniature motors, that, in addition to our standard 6.5 – 40N range of linear motors, also are available up to 450N with versions that are compatible with magnetic and vacuum environments. We also manufacture rotary piezo motors. Our engineers can help with customized solutions.

In our product portfolio you will also find Controllers and Software.

6,5N-40N Piezo motor range
Incredibly small and strong. The LL06, LT20 and LT 40 motors compared to a Euro coin

The main advantages of the piezo motor technology

  • Direct linear motion
  • Very high resolution down to nanometer and beyond
  • Force range from a few Newton up to 450 Newton
  • 0-80 mm stroke
  • Compact design enabeling miniaturization
  • Self-locking without adding power and zero backlash
  • Non-magnetic and do not generate magnetic fields
  • Vaccum compatible
  • Patented technology, developed and manufactured in house
LT40, 40N linear piezo motor
In house production of Legs Linear LT40 piezo motor

Markets and devices for linear motors and rotary piezo motors

When traditional motor technologies fail to meet space or performance demands Piezo Motors are the perfect choice.
They are used in Life Science Instrumentation and Medtech, Semicon, Optics and Automation markets in applications such as Semiconductor Processing Equipment, Nanometer Postitions Systems, Advanced Optic Applications, Active Autofocus Systems, Microdialysis Pumps and Surgical Robots.

How the LEGS® Linear and Rotary extreme precision piezo motors work

Piezo LEGS® work with friction drive, where force is created by the internal preload of the piezoceramic actuator legs in direct friction contact with the drive rod. When the legs start walking, they are always in mechanical contact with the drive rod. This results in Linear and rotary extreme precision piezo motors. Please note that a piezo actuator is not the same as a piezo motor.

If you want to know more about the technology, please visit our Piezo Motor Technology page.

Our standard Linear extreme precision piezo motor range

Legs Linear LL06 Piezo Motor

Direct drive Piezo motor – 6.5N stall force

The Legs Linear LL06 Piezo Motor has direct drive with no backlash and can microstep in the sub-nano meter range. It weighs only 16 grams and has a stall force of 6.5N. It is available with built-in encoder.

Full force power-off locking is a safety function inherent to the design. A version of the motor, designed for vacuum and non-magnetic environments, is available.

Linear motion 6N stall force piezo motor LL06
Legs Linear LL06 at a glance
Force:6.5 N
Stroke:0 to 74.1 mm
Speed:0-24 mm/s
Weight:16 g
Housing:Stainless Steel

LEGS Linear Twin LT20 Piezo Motor

Direct drive Piezo motor – stall force 20N – compatible with strong magnetic fields and vaccuum environments

It has direct drive with no backlash and can microstep in the sub-nano millimeter range. The motor comes as three different versions; standard stainless steel for normal environment, a vacuum version and a non-magnetic vacuum version.

Full force power-off locking is a safety function inherent to the design.

Linear motion 20N stall force piezo motor LT20
Legs Linear LT20 at a glance
Force:20 N
Stroke:0 to 74.5 mm
Speed:0-24 mm/s
Weight:29 g
Housing:Non-Magnetic or Stainless Steel

LEGS Linear Twin LT40 Piezo Motor

Direct drive Piezo motor – stall force 40N – compatible with strong magnetic fields and vaccuum environments

It has direct drive with no backlash and can microstep in the sub-nano millimeter range. The motor comes as three different versions; standard stainless steel for normal environment, a vacuum version and a non-magnetic vacuum version.

Full force power-off locking is a safety function inherent to the design.

Linear motion 40N stall force piezo motor LT40
Legs Linear LT40 at a glance
Force:40 N
Stroke:0 to 67 mm
Speed:0-12 mm/s
Weight:61 g
Housing:Non-Magnetic or Stainless Steel

Not finding what you are looking for?

Linear Motors

  • LTC40, is a covered 40N Linear Motor
  • LTC300 is a 300N Linear Motor designed to be vaccuum compatible
  • LTC 450 is a 450N Linear Motor designed to be vaccuum compatible

Rotary Motors

  • LR17 Rotary Piezo Motor with 0.2 mrad resolution integrated encoder.
  • LR23-50 Rotary Piezo Motor, 50mN-m, designed for vacuum and/or environments with strong magnetic fields.
  • LR23-80 Rotary Piezo Motor, 80 mN-m.