Piezo LEGS® X-Axis Precision Stages
Motion, perfected.
Precision positioning engineered for applications where every micron matters.
8 / 16 / 25 mm
Travel options
6 N / 20 N
Stall-force classes
40 nm
Encoder resolution
A precision stage built for stable, repeatable positioning
The X-axis family provides closed-loop single-axis motion across three travel classes. All five models combine 40 nm encoder resolution, ±40 nm repeatability and direct-drive Piezo LEGS® holding. The customer selects travel first, then the available 6 N or 20 N force class.

Key benefits
- 8, 16 or 25 mm total travel
- 6 N or 20 N stall-force classes
- 40 nm encoder resolution
- ±40 nm repeatability
- Load capacity up to 3 kg
- Stable holding without continuous motor power
Small movement. Big impact.
When precision defines performance, every movement matters. Piezo LEGS® technology delivers direct, controlled motion without the complexity of conventional transmission mechanisms.
PRECISION
40 nm resolution for demanding positioning.
STABILITY
Hold position without continuous motor power.
SIMPLICITY
Direct-drive motion with fewer mechanical components.
Built to move innovation forward.
From advanced optics to analytical instrumentation, precise motion enables better-performing systems.
ALIGN
Ootics, lasers and sensors with confidence.
POSITION
Lenses, detectors, fibres and samples exactly where needed.
SCAN
Smoothly and repeatedly for imaging, inspection and measurement
HOLD
Maintain position with stability and minimal power consumption.
One stage. Precision across every move.
Find your fit.
Travel
8 / 16 / 25 mm
Stall force
6 N / 20 N
Load
Up to 2 kg
Resolution
40 nm
Speed
Up to 5mm/s
Technical specifications
|
Model |
Motion range |
Stall force |
Load |
Max speed |
Weight |
|
LLS-X-06-8-C-E40 |
±4 mm (8 mm total) |
6 N |
1 kg |
5 mm/s |
250 g |
|
LLS-X-06-16-C-E40 |
±8 mm (16 mm total) |
6 N |
2 kg |
5 mm/s |
650 g |
|
LLS-X-20-16-C-E40 |
±8 mm (16 mm total) |
20 N |
2 kg |
5 mm/s |
650 g |
|
LLS-X-06-25-C-E40 |
±12.5 mm (25 mm total) |
6 N |
3 kg |
5 mm/s |
1.0 kg |
|
LLS-X-20-25-C-E40 |
±12.5 mm (25 mm total) |
20 N |
3 kg |
5 mm/s |
1.0 kg |
Shared platform specifications
|
Specification |
Family specification |
|
Encoder resolution |
40 nm |
|
Positioning repeatability |
±40 nm |
|
Body material |
Aluminium |
|
Recommended controller |
PMSD401 |
|
Stage cable |
CKS-20, 2 m; inclusion quantity to be confirmed |
Piezo LEGS® Precision Stages Applications
Semiconductor equipment
High-resolution focusing with minimal heat generation and excellent stationary stability.

Dimensional inspection and calibration
Dependable, repeatable motion for measurement verification and equipment calibration.

Optical alignment
Compact multi-axis positioning for precise alignment of optical components.

Precision laser positioning
Accurate multi-axis positioning for directing laser energy onto samples and components.

Ready to move your application forward?
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