Piezo LEGS® X-Axis Precision Stages

Motion, perfected.

Precision positioning engineered for applications where every micron matters.

8 / 16 / 25 mm

Travel options

6 N / 20 N

Stall-force classes

40 nm

Encoder resolution

A precision stage built for stable, repeatable positioning

The X-axis family provides closed-loop single-axis motion across three travel classes. All five models combine 40 nm encoder resolution, ±40 nm repeatability and direct-drive Piezo LEGS® holding. The customer selects travel first, then the available 6 N or 20 N force class.

Piezo LEGS® X-Axis Precision Stages

Key benefits

  • 8, 16 or 25 mm total travel
  • 6 N or 20 N stall-force classes
  • 40 nm encoder resolution
  • ±40 nm repeatability
  • Load capacity up to 3 kg
  • Stable holding without continuous motor power

Small movement. Big impact.

When precision defines performance, every movement matters. Piezo LEGS® technology delivers direct, controlled motion without the complexity of conventional transmission mechanisms.

40 nm resolution for demanding positioning.

Hold position without continuous motor power.

Direct-drive motion with fewer mechanical components.

Built to move innovation forward.

From advanced optics to analytical instrumentation, precise motion enables better-performing systems.

Ootics, lasers and sensors with confidence.

Lenses, detectors, fibres and samples exactly where needed.

Smoothly and repeatedly for imaging, inspection and measurement

Maintain position with stability and minimal power consumption.

One stage. Precision across every move.

Find your fit.

8 / 16 / 25 mm

6 N / 20 N

Up to 2 kg

40 nm

Up to 5mm/s

Technical specifications

Model

Motion range

Stall force

Load

Max speed

Weight

LLS-X-06-8-C-E40

±4 mm (8 mm total)

6 N

1 kg

5 mm/s

250 g

LLS-X-06-16-C-E40

±8 mm (16 mm total)

6 N

2 kg

5 mm/s

650 g

LLS-X-20-16-C-E40

±8 mm (16 mm total)

20 N

2 kg

5 mm/s

650 g

LLS-X-06-25-C-E40

±12.5 mm (25 mm total)

6 N

3 kg

5 mm/s

1.0 kg

LLS-X-20-25-C-E40

±12.5 mm (25 mm total)

20 N

3 kg

5 mm/s

1.0 kg

Shared platform specifications

Specification

Family specification

Encoder resolution

40 nm

Positioning repeatability

±40 nm

Body material

Aluminium

Recommended controller

PMSD401

Stage cable

CKS-20, 2 m; inclusion quantity to be confirmed

Piezo LEGS® Precision Stages Applications

Semiconductor equipment

High-resolution focusing with minimal heat generation and excellent stationary stability.

Dimensional inspection and calibration

Dependable, repeatable motion for measurement verification and equipment calibration.

Optical alignment

Compact multi-axis positioning for precise alignment of optical components.

Precision laser positioning

Accurate multi-axis positioning for directing laser energy onto samples and components.

Ready to move your application forward?

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