Piezo LEGS® XY Precision Stages with Aperture

Motion, perfected.

Integrated two-axis positioning with optical access and two force options.

16 x 16 mm

X-Y travel

6 N / 20 N

Forces per axis

40 nm

Encoder resolution

A precision stage built for stable, repeatable positioning

The XY family combines two closed-loop axes with a central aperture for optical access. Both models provide X ±8 mm and Y ±8 mm motion; the customer selects 6 N or 20 N stall force per axis.

Piezo LEGS® XY Precision Stage with Aperture

Key benefits

X ±8 mm and Y ±8 mm
6 N or 20 N stall force per axis
40 nm encoder resolution per axis
Central optical aperture
2 kg load capacity
Two-axis PMSD402 control

Small movement. Big impact.

When precision defines performance, every movement matters. Piezo LEGS® technology delivers direct, controlled motion without the complexity of conventional transmission mechanisms.

PRECISION

40 nm resolution for demanding positioning.

STABILITY

Hold X-Y position without continuous motor power.

SIMPLICITY

Integrated two-axis platform with central aperture.

Built to move innovation forward.

From advanced optics to analytical instrumentation, precision motion enables better-performing systems.

ALIGN

Position optics, wafers and sensors in X and Y.

POSITION

Move specimens while preserving optical access.

MAP

Scan surfaces and detector response across two axes.

HOLD

Maintain the selected X-Y position with low stationary heat.

One stage. Precision across every move.

Typical applications

Microscopy and specimen positioning
Optical imaging with through-stage access
Wafer, sensor and detector alignment
Precision mapping and metrology
Laser and photonics alignment

What this enables

Position a specimen while maintaining an unobstructed optical path through the stage aperture.
Map a surface or sensor response across two axes with repeatable closed-loop motion.
Align optical or photonic components in X and Y without stacking separate single-axis stages.

Find your fit.

Choose 6 N per axis for typical specimen, sensor and optical-component positioning. Choose 20 N per axis where cable forces, process loads or dynamic demands require additional drive-force reserve. Confirm that the aperture, payload centre of gravity and applied moments are compatible with the final mechanical arrangement.

Technical specifications

Model	Motion range	Stall force	Load	Max speed	Weight
LLS-XY-06-16-C-E40	X ±8 mm; Y ±8 mm	6 N per axis	2 kg	5 mm/s	2.5 kg
LLS-XY-20-16-C-E40	X ±8 mm; Y ±8 mm	20 N per axis	2 kg	5 mm/s	2.5 kg

Shared platform specifications

Specification	Family specification
Encoder resolution	40 nm (X/Y)
Positioning repeatability	±40 nm (X/Y)
Body material	Aluminium
Recommended controller	PMSD402
Stage cable	CKS-20, 2 m; inclusion quantity to be confirmed