Piezo LEGS® Z-Axis Precision Stages

Motion, perfected.

Two vertical-positioning mechanisms for travel-led or load-led applications.

3 / 12 mm

Vertical travel

0.5 / 5 kg

Load options

40 nm

Encoder resolution

A precision stage built for stable, repeatable positioning

The Z-axis family includes a 12 mm direct vertical stage and a compact 3 mm horizontal-lift stage. The correct choice is driven by mechanism, travel, installation envelope and payload requirement.

Piezo LEGS® Z-Axis Precision Stages

Key benefits

  • Vertical and horizontal-lift mechanisms
  • 12 mm or 3 mm total travel
  • 0.5 kg or 5 kg load capacity
  • 40 nm encoder resolution
  • 20 N actuator stall force
  • Stable fixed-position holding

Where this stage fits

The Z-axis family brings two different vertical mechanisms onto one customer-selection page. The vertical Z model provides 12 mm travel for focus, height and working-distance adjustment. The horizontal-lift model converts horizontal actuation into a compact 3 mm lift and supports the higher stated load.

Why Piezo LEGS® direct drive

Both stages use integrated encoder feedback and Piezo LEGS® holding behaviour, but they solve different mechanical problems. The vertical model prioritises travel; the horizontal-lift model prioritises compact installation and load capacity. Both can maintain a selected position without continuous motor power.

Small movement. Big impact.

When precision defines performance, every movement matters. Piezo LEGS® technology delivers direct, controlled motion without the complexity of conventional transmission mechanisms.

40 nm resolution for controlled height adjustment.

Mechanically stable holding at the selected height.

Select travel-led or high-load lift geometry.

Built to move innovation forward.

From advanced optics to analytical instrumentation, precision motion enables better-performing systems.

Adjust objectives, cameras and detectors.

Raise fixtures and optical assemblies precisely.

Fine-adjust sample or sensor height.

Maintain working distance without continuous motor power.

One stage. Precision across every move.

Typical applications

  • Objective and camera focusing
  • Sensor or sample height adjustment
  • Optical bench Z positioning
  • Analytical and inspection equipment
  • Automated calibration systems
  • Compact optical height adjustment
  • High-load precision elevation
  • Instrument calibration
  • Sample and fixture levelling
  • Inspection and metrology systems

What this enables

  • Adjust an objective or detector to a defined focus position and hold it without continuous motor power.
  • Control sample height during inspection or surface measurement.
  • Automate working-distance adjustment in optical or analytical instruments.
  • Raise or lower a comparatively heavy optical assembly within a compact mechanical envelope.
  • Fine-adjust the height of a fixture or sensor during calibration.
  • Integrate closed-loop Z adjustment where a conventional vertical actuator would be too tall.

Find your fit

Choose LLS-ZV-20-12-C-E40 when 12 mm travel is required and the load is within 0.5 kg. Choose LLS-ZH-20-3-C-E40 when 3 mm travel is sufficient, vertical installation space is constrained and a load capacity up to 5 kg is required. Confirm mounting orientation, centre of gravity and moments.

Technical specifications

Model

Motion range

Stall force

Load

Max speed

Weight

LLS-ZV-20-12-C-E40

±6 mm (12 mm total)

20 N

0.5 kg

5 mm/s

900 g

LLS-ZH-20-3-C-E40

±1.5 mm (3 mm total)

20 N

5 kg

1 mm/s

1.1 kg

Shared platform specifications

Specification

Family specification

Encoder resolution

40 nm

Positioning repeatability

±40 nm

Body material

Aluminium

Recommended controller

PMSD401

Stage cable

CKS-20, 2 m; inclusion quantity to be confirmed

Piezo LEGS® Precision Stages Applications

Semiconductor equipment

High-resolution focusing with minimal heat generation and excellent stationary stability.

Dimensional inspection and calibration

Dependable, repeatable motion for measurement verification and equipment calibration.

Precision vertical positioning of heavy loads

Nanometer-scale vertical positioning with high load capacity and stable holding.

Advanced microscopy

Low-profile, repeatable motion for automated sample scanning and objective positioning.

Precision laser positioning

Accurate multi-axis positioning for directing laser energy onto samples and components.

Ready to move your application forward?

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