Piezo LEGS® Z-Axis Precision Stages
Motion, perfected.
Two vertical-positioning mechanisms for travel-led or load-led applications.
3 / 12 mm
Vertical travel
0.5 / 5 kg
Load options
40 nm
Encoder resolution
A precision stage built for stable, repeatable positioning
The Z-axis family includes a 12 mm direct vertical stage and a compact 3 mm horizontal-lift stage. The correct choice is driven by mechanism, travel, installation envelope and payload requirement.

Key benefits
- Vertical and horizontal-lift mechanisms
- 12 mm or 3 mm total travel
- 0.5 kg or 5 kg load capacity
- 40 nm encoder resolution
- 20 N actuator stall force
- Stable fixed-position holding
Where this stage fits
The Z-axis family brings two different vertical mechanisms onto one customer-selection page. The vertical Z model provides 12 mm travel for focus, height and working-distance adjustment. The horizontal-lift model converts horizontal actuation into a compact 3 mm lift and supports the higher stated load.
Why Piezo LEGS® direct drive
Both stages use integrated encoder feedback and Piezo LEGS® holding behaviour, but they solve different mechanical problems. The vertical model prioritises travel; the horizontal-lift model prioritises compact installation and load capacity. Both can maintain a selected position without continuous motor power.
Small movement. Big impact.
When precision defines performance, every movement matters. Piezo LEGS® technology delivers direct, controlled motion without the complexity of conventional transmission mechanisms.
PRECISION
40 nm resolution for controlled height adjustment.
STABILITY
Mechanically stable holding at the selected height.
CHOICE
Select travel-led or high-load lift geometry.
Built to move innovation forward.
From advanced optics to analytical instrumentation, precision motion enables better-performing systems.
FOCUS
Adjust objectives, cameras and detectors.
LIFT
Raise fixtures and optical assemblies precisely.
LEVEL
Fine-adjust sample or sensor height.
HOLD
Maintain working distance without continuous motor power.
One stage. Precision across every move.
Typical applications
- Objective and camera focusing
- Sensor or sample height adjustment
- Optical bench Z positioning
- Analytical and inspection equipment
- Automated calibration systems
- Compact optical height adjustment
- High-load precision elevation
- Instrument calibration
- Sample and fixture levelling
- Inspection and metrology systems
What this enables
- Adjust an objective or detector to a defined focus position and hold it without continuous motor power.
- Control sample height during inspection or surface measurement.
- Automate working-distance adjustment in optical or analytical instruments.
- Raise or lower a comparatively heavy optical assembly within a compact mechanical envelope.
- Fine-adjust the height of a fixture or sensor during calibration.
- Integrate closed-loop Z adjustment where a conventional vertical actuator would be too tall.
Find your fit
Choose LLS-ZV-20-12-C-E40 when 12 mm travel is required and the load is within 0.5 kg. Choose LLS-ZH-20-3-C-E40 when 3 mm travel is sufficient, vertical installation space is constrained and a load capacity up to 5 kg is required. Confirm mounting orientation, centre of gravity and moments.
Technical specifications
|
Model |
Motion range |
Stall force |
Load |
Max speed |
Weight |
|
LLS-ZV-20-12-C-E40 |
±6 mm (12 mm total) |
20 N |
0.5 kg |
5 mm/s |
900 g |
|
LLS-ZH-20-3-C-E40 |
±1.5 mm (3 mm total) |
20 N |
5 kg |
1 mm/s |
1.1 kg |
Shared platform specifications
|
Specification |
Family specification |
|
Encoder resolution |
40 nm |
|
Positioning repeatability |
±40 nm |
|
Body material |
Aluminium |
|
Recommended controller |
PMSD401 |
|
Stage cable |
CKS-20, 2 m; inclusion quantity to be confirmed |
Piezo LEGS® Precision Stages Applications
Semiconductor equipment
High-resolution focusing with minimal heat generation and excellent stationary stability.

Dimensional inspection and calibration
Dependable, repeatable motion for measurement verification and equipment calibration.

Precision vertical positioning of heavy loads
Nanometer-scale vertical positioning with high load capacity and stable holding.

Advanced microscopy
Low-profile, repeatable motion for automated sample scanning and objective positioning.

Precision laser positioning
Accurate multi-axis positioning for directing laser energy onto samples and components.

Ready to move your application forward?
Fill in the form below – we’ll help you find the right stage
