Ultra smooth Zero drift linear ultrasonic stage

Stable and accurate linear stage

Sensapex ultrasonic stage

Closed loop piezo motion stage

  • Compact
  • 20 mm stroke
  • High resolution – 10 nm
  • High holding force – 10 N
  • ZERO DRIFT®
  • Self-locking
  • No backlash
  • Integrated control electronics

Specifications Acuvi SPS-40 linear stage-preliminary

ParameterValue
Maximum stroke20 mm
Maximum speed – unloaded8 mm/s
Maximum speed – loaded
Max operating frequency35 kHz
Bi-directional repeatability100 nm
Minimal incremental motion10 nm
Axial/Vertical load capacity1.5-3 N
Holding force14 N
Open loop stiffness1 N/µm
Centered load capacity10 N
VacuumNo
Non-magneticNo
Operating voltage12 V
Power consumption1.5 W (idle) / 5 W max
Pitch/YawX µrad
Mechanical size L x H x D44x40x20 mm
Weight (without cables)100 g
Material in motor housingAluminum
BearingsCross roller
Operating temperature (recommended0 to +50°C
Storage temperature-40 to +105°C
Built in encoderYes
Encoder resolution2,4 nm
IndexNo
Limit switchesNo, mechanical end stops

Acuvi Piezo SPS-40 Linear Stage Product Description

The SPS-40 series is a compact and low-profile piezo linear stage, featuring integrated encoder and controller, with closed-loop piezo motion, and high holding force when powered off, enabling our patent protected ZERO DRIFT™ technology.  It also eliminates unnecessary power consumption without having to worry about losing position.

By using ultrasonic drive frequency, the drive operates quietly and makes it perfect for tabletop equipment and other applications with close human presence.

High holding force when powered off eliminating unnecessary power consumption without worrying about losing position.

Options to stack in XY or XYZ stage configurations.

Simple system integration through Ethernet communication and Open-source SDK (Python and MATLAB wrappers available).

Senspex control unit and touch screen

Controlling the motor

Our motor control units come in many different versions, with controllers and amplifiers for laboratory use as well as for integration into OEM devices.

We can also license the drivers for customers that want to build their own driver electronics.