450N, vacuum compatible linear actuator
The Piezo LEGS® LTC450 delivers nanometer resolution with load capacity of 450 N with a 20 mm stroke
Sub-nanometer precision for the Semicon industry
- Vacuum capable
- 450 N force
- Resolution down to sub-nanometer
- 20 mm stroke
- Self-locking
- No backlash
True direct linear drive
The drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor moves by microstepping, dividing a full waveform-step into nanometer size increments. Speed ranges from nanometers per second to millimeters per second, and can be seamlessly controlled in the whole dynamic range with no need to alter the driving mode.
The twin concept makes for high force output in a compact body, in this case a stall force of 450N. This gives a more robust design without the need of ball bearings.
It has direct drive with no backlash and can microstep in the sub-nano millimeter range. Designed for vacuum environments
Full force greater then 450 Newton power-off locking safety function inherent to the design.
Specifications Piezo LEGS® LTC450 heavy duty linear actuator
| Type | Vacuum (B) | Unit |
| Maximum stroke | 20 | mm |
| Maximum speed Driver dependent | 0.2 | mm/s |
| Minimum speed Driver dependent | 1 | μm |
| Stall force | 450 | N |
| Holding force | >450 | N |
| Vacuum | Yes | 10-7 torr |
| Non-magnetic | No | |
| Operating voltage | 42-49 | V |
| Power consumption | 300 | mW/Hz |
| Mechanical size L x H x D with guides and encoder | N/A | mm |
| Mechanical size L x H x D without guides and encoder | 98 x 50 x 50 | mm |
| Weight with 50 mm drive rod | 1060 | gram |
| Material in motor housing | Stainless steel | |
| Operating temperature recommended | +10 to +70 | ºC |
| Connector motor | Soldered cable with JST O5SR-3S | |
| Connector encoder | ||
| Resolution motor | <1 | nm |
| Built in encoder | No | |
| Encoder resolution | N/A | µm |
Main dimensions LTC450
Motor performance LTC450
Motor performance with waveform Rhomb (filled) and waveform Delta (dotted). The full step length is the average distance the drive rod moves when the legs take one full step (i.e. for one waveform cycle).
Note: A standard deviation σ of 0.5 μm should be taken into account.
Typical values are given for 20ºC.
Stroke range
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Stroke (mm) with one adapter
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Drive rod length (mm)
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0-20 |
Fixed
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Motor speed at 20 ºC no load
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Waveform
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Max feq. (Hz)
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Speed range (mm/s)
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Delta
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50
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0-0.15
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Rhomb |
0-0.2
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Controlling the motor
Our motor control units come in many different versions, with controllers and amplifiers for laboratory use as well as for integration into OEM devices.
We can also license the drivers for customers that want to build their own driver electronics.
