High precision linear 6,5N piezo actuator
The Piezo LEGS® LL06 Piezo linear actuator with integrated encoder and built in guiding is intended for OEM applications with focus on precise positioning in tight spaces.
6,5N force, exceptional size to force ratio and nano-precision
- 6.5 N force
- Nanometer precision
- High Resolution optical encoder
- Direct drive – Backlash free
- No power draw in hold position
- Self locking during power loss
- Quick response and high speed dynamics
The Piezo LEGS® LL06 linear actuator
A 6.5N linear direct drive piezo actuator that is extremely compact, weighing only 16 grams. It has true direct drive with no backlash and can microstep in the sub-nanometer range. This compact linear actuator is available with or without built-in encoder (e.g., 1.25 µm or 80 nm) and/or guiding.
The LL06 is available with a high resolution position sensor, and with drive rods of different lengths (30, 40, 50, 60 and 100.8 mm). The motor is easily integrated and will most likely simplify and reduce the size of your system.
Full force 6.5 Newton power-off locking safety function.
For control of the motor we offer a range of drivers and controllers.
Specifications Piezo LEGS® LL06
|
Type |
Standard |
|
Maximum stroke |
74.1 mm |
|
Speed range @ Rhomb, no load, 20ºC |
0.1nm/s – 20mm/s (check driver) |
|
Step length, full step @ Delta, no load, 20ºC |
4.5 µm (see chart) |
|
Maximum speed (driver and waveform dependent) |
One full step in 12h |
|
Max operating frequency (driver dependent) |
2.5 kHz |
|
Movement resolution |
<1nm |
|
Stall force |
6.5 N |
|
Holding force |
>6.5 N |
|
Vacuum |
No |
|
Non-magnetic |
No |
|
Operating voltage |
0-48 V (proprietary waveform) |
|
Power consumption |
5 mW/Hz |
|
Mechanical size L x H x D with guides and encoder |
23.4 x 19.6 x 10.5 mm |
|
Mechanical size L x H x D without guides and encoder |
17 x 19.6 x 10.5 mm |
|
Weight with 50 mm drive rod |
16 g |
|
Material in motor housing |
Stainless steel |
|
Operating temperature (recommended) |
-20 to +70°C |
|
Storage temperature |
-20 to +70°C |
|
Built in encoder (not available with 30 mm drive rod) |
Yes, optional |
|
Encoder resolution (encoder E1) |
1.25 (encoder E1, guide G1) |
|
Encoder resolution (encoder E2) |
0.08 µm |
|
Connector motor (motor side) |
Hirose DF52-5S-0.8H |
|
Connector encoder (motor side) |
Hirose DF52-6S-0.8H |
|
Control |
Open Loop or Closed loop |
|
Lifetime (km) |
11km (at half load, room condition, 600Hz) |
|
Index |
up to 2 per full stroke |
|
Max. acceleration |
800Hz/ms |
Dimensions of the Piezo LEGS® LL06
Motor performance LL06
Motor performance with waveform Rhomb (filled) and waveform Delta (dotted). The full step length is the average distance the drive rod moves when the legs take one full step (i.e. for one waveform cycle).
Note: A standard deviation σ of 0.5 μm should be taken into account. Typical values are given for 20ºC.
Stroke range LL06
|
Stroke (mm) with one adapter
|
Drive rod length (mm)
|
|
0-3.1
|
30 (not available with encoder)
|
|
0-13.1 |
40
|
|
0-23.1 |
50
|
|
0-33.1 |
60
|
|
0-74.1 |
100.8
|
Motor speed at 20 ºC
|
Waveform
|
Max feq. (Hz)
|
Speed range (mm/s)
|
|
Delta
|
3000
|
0-15
|
|
Rhomb |
0-24
|
LL06 front and back
- Motor Housing | 2. Drive Rod | 3. Front adapter | 4. Encoder scale on drive rod | 5. Integrated encoder, 1.25µm – 80 nm resolution | 6. Built in guiding
Controlling the motor
Our motor control units come in many different versions, with controllers and amplifiers for laboratory use as well as for integration into OEM devices. These controllers are compatible with the compact linear actuator for optimal performance.
We can also license the drivers for customers that want to build their own driver electronics.
Starter Kit
Our Starter Kits are designed to simplify evaluation and accelerate development. Available in multiple configurations, they provide everything needed to begin testing and integrating your selected motor platform.
Each kit includes the required components to evaluate the motor.
Configure the LL06 and get a quote
