Semiconductor equipment
High-resolution focusing with minimal heat generation and excellent stationary stability.
PiezoMotor precision stages support accurate focusing and positioning of devices, lenses and inspection components used in semiconductor manufacturing and metrology equipment.
The combination of relatively long travel for coarse adjustment and high resolution for fine positioning makes the stages suitable for demanding focusing applications. Minimal motor heat generation helps protect thermally sensitive processes, while stable holding supports applications where the position must remain unchanged for extended periods.
Key reasons for selection
- High-resolution coarse and fine positioning
- Minimal motor-generated heat
- Excellent stationary stability
- Compact integration
- No requirement for continuous high-speed movement
X-Axis Precision Stages
Precision positioning engineered for applications where every micron matters.
XY Precision Stages with Aperture
Integrated two-axis positioning with optical access and two force options.
Z-Axis Precision Stages
Two vertical-positioning mechanisms for travel-led or load-led applications.
